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topics & Technologies  

In our projects, we are working primarily on the following topics:

  • OLEDs - The Surface Light
  • TCO - The Translucent Conductor
  • CSP - Concentrated Solar Power
Overview
Topics
Patents & Solutions
Research Cooperations
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TCO – THE TRANSLUCENT CONDUCTOR

Transparent Conductive Oxides are indispensible to the functioning of flat displays, solar cells or OLED. The TCO-layers, depending on their use and composition, are characterized by a very high transparency both in the visible and in the infrared spectrum. Their conductivity enables the contacting at low loss of the electrically active layers without remarkably constraining the light to quit or pass through the active layer. TCO normally consist of metal oxides and can be deposited in different ways.
Besides their optical and electrical properties, TCO-layers must allow laser structuring and, for certain photovoltaic applications, etching for a special surface topography in order to capture the sunlight.  

VON ARDENNE Development

Research and development at VON ARDENNE concentrate on doped zinc oxide layers (AZO) to be deposited on large areas by sputtering from magnetrons with cylindrical targets.
By developing a process technology for industry use, these layers were tested in a-Si/µcSi thin-film solar cells and achieved characteristics of the respective reference cells developed at the research center „Forschungszentrum Jülich". These characteristics were subsequently substantiated for large areas (Gen5 formats). Other projects in this field aimed at improving layer properties and developing cost-optimized production processes for TCO-layers the characteristics of which may be tailored to the respective application.

  • Ausbildung
  • VON ARDENNE
    • Products
      • Architectural Glass
        • Overview
        • Equipment Platforms
        • Key Components
        • Layer Systems
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        • Overview
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        • Wafer PV
        • Layer Systems
        • Key Components
      • Others
        • Optical Refinement
      • R&D+Pilot Systems
        • Overview
        • Vertical Inline
          • VISS300S Sputter System for TCO
          • VISS300S Sputter System for TCO and Metals
          • VISS400P PECVD System
          • VISS600S Sputter System
          • VISS600S für Metalloxide
        • Horizontal Inline
          • HISS300E Evaporation System for Metals & Metal Oxides
        • Cluster
          • CS320S Sputter System
          • CS400ES Co-PVD System
          • CS800ES PVD System
          • CS400PS PECVD & PVD System
          • CS400PS PECVD & Sputter System
          • CS1200S Cluster System
        • Load-Lock
          • LS400C ALD-MOCVD System for Oxides
          • LS730S Sputter System for Metals & Oxides
        • Batch
          • BS600S Sputter System
          • BS980S Sputter System
        • Key Components
          • Sputtering
          • Evaporation
          • PECVD/CVD/ALD/Plasmapolymerization
          • Sputter etching/ion etching/plasma treatment
          • Heat treatment
          • Substrate holder and manipulation
          • Process control
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        • Profile
        • History
          • Introduction
          • Electron Beam Technologies
          • 1928-1945: Laboratory for Electron Physics
          • Plasma Physics Technologies
          • 1945-1955: Institute for Industrial Isotope Separation
          • Vacuum Coating
          • 1955-1990: Manfred von Ardenne Research Institute
          • Biomedicine
          • 1991 to the present: VON ARDENNE
          • Company History Milestones
        • Manfred von Ardenne
          • Introduction
          • 1955-1990: New Home in Dresden
          • 1907: Birth and Family Background
          • Private Life
          • 1907-1928: Childhood and Youth
          • Manfred von Ardenne as Visionary
          • 1928-1945: Berlin Years
          • Legacy
          • 1945-1955: The Research Institute near Sukhumi
          • Scientific Discoveries and Inventions
      • Research & Development
        • Overview
        • Topics
          • OLEDs - The Surface Light
          • TCO - The Translucent Conductor
          • CSP - Concentrated Solar Power
        • Patents & Solutions
        • Research Cooperations
      • Quality Management
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