key components

evaporation

Dual Filament Effusion Cell
CT CHALCO
Evaporation material: Se, S, ... 
Crucible volume: 200 cm³
Power: max. 900 W (effusion cell) und 500 W (hot-lip) 

Integration conditions/design: 

• DN CF 100; Mo
• effusion cells and hot-lip temperature  0 ^oC - 1300 ^oC
• water cooling is optional 
• manual, electric or pneumatic diaphragm drive

Dual Filament Effusion Cell
CT CIG
Evaporation material: Ga, In, Cu 
Crucible volume: 150 cm³
Power: max. 560 W (effusion cell) und 1100 W (hot-lip) 

Integration conditions/design: 

• DN CF 100; pyrolytic boron nitrid
• effusion cell and hot-lip temperature 0 ^oC- 1500 ^oC
• water cooling is optional
• manual, electric or pneumatic diaphragm drive

Dual Filament Effusion Cell
CT Si-DOP
Evaporation material: silicon dopants
Crucible volume: 100 cm³
Power: max. 1300 W (effusion cell) und 700 W (hot-lip)

• DN CF 100; pyrolytic boron nitrid
• water cooling is optional
• manual, electric or pneumatic diaphragm drive

Electron Beam Evaporator
FT EV M-6
Evaporation material: Cr, Cu, Al, Ag, Ti,...; SiO₂, Ta₂O₅,...; multiple layers; large area coating 
Crucible volume: 4x8 cm³
Power: ≤5000 W

Integration conditions/design:  

• multi-hole-crucible and other systems 
• operating pressure ≤ 5·10-3 mbar
• distance between source and substrate app. 600 mm  
• water cooling; 4 - 10 kV
• beam deflection 270°

Jet Evaporator
JE 15
Evaporation material: Al, Mg... 
Crucible volume: 500 cm³
Power: 15000 W

Integration conditions/design:  

• water cooling