key components
Offers for our R&D + Pilot Systems and for the upgrading of sytems delivered by us:
Heat treatment
Radiation heater
Inconel heater, halogen lamp CFC heater
Application: substrate conditioning and heating before, after and during coating process
Properties: substrate temperature > 100 oC, heating of front or back side
Substrate holder
CFC meander
Application: substrate conditioning and heating before, after and during coating process
Properties: maximum heater surface temperature > 1000 °C
Substrate holder
Coat pipe heater, aluminum
Application: substrate conditioning and heating before, after and during coating process
Properties: maximum heater surface temperature 450 °C; suitable for plasma-chemical cleaning
Substrate holder
Coat pipe heater, stainless steel
Application: substrate conditioning and heating before, after and during coating process
Properties: maximum heater surface temperature 900 °C
