R&D and Pilot systems

Our modular R&D and pilot systems serve research and development for a variety of applications. They are increasingly being used not only for research and pilot projects but for production purposes for small substrate sizes of up to 400 mm x 400 mm.
Our customers may choose among a great number of plant configurations which can be tailored with pin-point accuracy to their requirements. The systems' modular structure facilitates their optimal adjustment to technology and productivity.

Please do not hesitate to contact us for further information. Get in touch!

Overview

Vertical Inline

main fields of application

Photovoltaics
Optics
Sensors
Electronics / MEMS
Power engineering

processable workpieces

Plates
Wafers
Tubes
Solids

Available Technologies

Sputtering
Evaporation with / without ionization
Plasma chemical vapor deposition (PECVD)
Plasma polymerization, atomic layer deposition (ALD), tempering
Ion etching
Plasma chemical etching

scope of delivery and services

Features

high flexibility for tailored solutions and options for system extensions
innovative solutions and benefits from long-standing experience with vacuum thin-film technology

Production and technology standard

certified according to ISO 9001
guaranteed by in-house developed components and renowned experts
backed by solutions tested in serial production

Scope of services

all encompassing from initial advice to after sales service according to the customer's wishes
"carefree" package

We cooperate with renowned research institutes and industrial partners worldwide.