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electron beam systems  

Electron beam technology is used for melting, coating and heat treatment processes. As early as in 1959, the first 45 kW electron beam furnace for melting of reactive and refractory metals was built at the Manfred von Ardenne Research Institute in Dresden. Today, we build the most powerful electron beam guns worldwide and combine the appropriate key components for different applications.

For further information: Get in touch!

Overview
Applications
Components
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the following electron beam guns are available:

HIGH POWER ELECTRON BEAM GUN EH150V, EH300V, EH800V 
VIEWPORT VP654

We understand the requirements and fulfill the demands of our customers thanks to our individual service. At the same time, we run our own developing center for electron beam components and technologies and cooperate with established research institutions. So far, more than 400 of our electron beam systems have been installed worldwide. Our customers appreciate the following features in particular: 

  • Reliable, state-of-the-art industrial design for all components
  • Long cathode service life
  • Ease of maintenance
  • Separation of beam generation & process due to high pressure decoupling between cathode system and process chamber
  • High industrial safety standards
  • Established training programs and after sales service
  • Ausbildung
  • VON ARDENNE
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        • Vertical Inline
          • VISS300S Sputter System for TCO
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          • VISS400P PECVD System
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          • VISS600S für Metalloxide
        • Horizontal Inline
          • HISS300E Evaporation System for Metals & Metal Oxides
        • Cluster
          • CS320S Sputter System
          • CS400ES Co-PVD System
          • CS800ES PVD System
          • CS400PS PECVD & PVD System
          • CS400PS PECVD & Sputter System
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        • Load-Lock
          • LS400C ALD-MOCVD System for Oxides
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        • Batch
          • BS600S Sputter System
          • BS980S Sputter System
        • Key Components
          • Sputtering
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          • PECVD/CVD/ALD/Plasmapolymerization
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          • Introduction
          • Electron Beam Technologies
          • 1928-1945: Laboratory for Electron Physics
          • Plasma Physics Technologies
          • 1945-1955: Institute for Industrial Isotope Separation
          • Vacuum Coating
          • 1955-1990: Manfred von Ardenne Research Institute
          • Biomedicine
          • 1991 to the present: VON ARDENNE
          • Company History Milestones
        • Manfred von Ardenne
          • Introduction
          • 1955-1990: New Home in Dresden
          • 1907: Birth and Family Background
          • Private Life
          • 1907-1928: Childhood and Youth
          • Manfred von Ardenne as Visionary
          • 1928-1945: Berlin Years
          • Legacy
          • 1945-1955: The Research Institute near Sukhumi
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