Modular Process Systems
Originally intended for the construction of small installations, the Modular Process Systems business field has been an independent structural unit in the company since 2006.
The systems are based on a modular machinery platform that reflects the flexibility, efficiency, capability for innovation, and technological expertise of VON ARDENNE. This area produces in-line, cluster, load lock, and batch-type systems for research and pilot projects and increasingly for production purposes for coating smaller substrates.
Through the supply of small scale modular coating systems VON ARDENNE enables its customers to conduct a highly-productive metallization of special components with difficult geometry.
Components and films are developed at customer´s option and implemented.
Product information:
CS250SCluster System
[download: *.pdf; 0,16 MB]
CS500PSPECVD Cluster System
[download: *.pdf; 0,32 MB]
CS 730 SCluster System
[download: *.pdf; 0,22 MB]
CS 850 SCluster System
[download: *.pdf; 0,27 MB]
CS 850 SUHV Cluster System
[download: *.pdf; 0,21 MB]
KA 540Sputter Plant For Small-Sized Parts
[download: *.pdf; 0,16 MB]