vertical glass COATING system

The vertical inline sputter system VISS is an appropriate, modular solution for vertical deposition processes when scaling up from laboratory use to production. The tool is available either as a single end inline or for continuous processing and is uniquely suited for scaling up to substrate sizes of approximately 400 mm x 400 mm.

The substrates are transported by a carrier system, which is tilted vertically by seven degrees. The substrates can be loaded without touching their front side.


Anwendung: Photovoltaik, Präzisionsoptik

Substratform: plan/eben

Substratmaterial: Glas, metals, Polymer, Wafer

Beschichtungstechnologie: Magnetronsputtern von oben nach unten, Magnetronsputtern von unten nach oben

Funktion: Antireflexion, Kontakt, Passivierung, TCO

Schichten & Schichtstapel: Ag, Al, AlOx, AZO, Cu, ITiO, ITO, NiV, SiN, SiOx, Ti, TiOx, Zn

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