VA TRIM & SHIM TOOL

The VON ARDENNE Online Trimming and Shimming Module is a web-based application that enables the quick optimization of the thickness uniformity ("% range") of a single thin layer.

After entering a measured thickness profile and the current trim gas settings, it proposes new trim gas settings that lead to improved uniformity.

In the same manner, the magnet bar adjustment ("shimming") for optimal settings can be calculated.

Application:
- Startup tuning of uniformity after target change
- Pit stop correction of long-term drift of thickness profile

Benefits:
- Trial-and-error tuning replaced by field-tested mathematical method
- Best possible setting usually found with 3 to 4 single-layer experiments, leading to reduced maintenance  time
- Increased product quality
- Enables applications with high uniformity requirements
- Simple and user friendly
- Runs on every device with internet connection and a browser, e.g. PC workstation, smartphone,...

PLASMA COMPONENTS
Technology competence
Production/Internet/Live