RSM/RSM-RSMT/RSMT Magnetrons

RSM rotatable single magnetrons are suitable for a wide scope of DC processes with a power range from 10 to 180 kilowatts. They can be equipped with a variety of magnet designs and offer a fully integrated gas inlet system for the best process control performance.

RSMT - T-Series-Magnetrons: VON ARDENNE has combined the magnetron sputter source technology with turbomolecular pumps to create a new key component class - the T-Series Magnetrons.

Furthermore, we have equipped the rotatable magnetrons of the T-Series with the new X-Series end blocks.

T-SERIES MAGNETRONS [PDF]
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