SCALA

MODULAR COATING SYSTEM

The SCALA is a modular vacuum coating system with a carrier-based substrate transport. It is specifically designed for crystalline PV applications on silicon wafers such as TCO and metal layers for heterojunction solar cells (HJT).

However, it can also be adjusted for thin-film PV applications on glass or other applications on flat substrates.

Thanks to its modular design, the SCALA can be configured according to the needs of the customer. We offer two basic configurations of the system. The SCALA LabX is a single-ended tool for batch processing with or without load lock and is ideally suited for process and application development at laboratory scale.

The SCALA PilotX, on the other hand, is designed for inline operation and therefore suitable for pilot production.

 

 

Overview

Applications: architectural glazing, fuel cells, mobile devices, photovoltaics

Substrate shape: flat/rigid, three-dimensional

Substrate material: aluminum, glass, metals, polymer, stainless steel, wafers

Coating Technology: electron beam technology, magnetron sputtering down, magnetron sputtering up

Function: anti-reflection, contact, corrosion protection, decoration, heat insulation, passivation, scratch-resistant, solar control, TCO, wave length filter

Layers & Layer stacks: Ag, Al, AlOx, AZO, C, Co, Cr, Cu, Double Low-E, ITiO, ITO, Low-E, Ni, NiV, Si, SiN, SiOx, Solar Control, Ti, TiOx, Triple Low-E, Zn

Corresponding Components & Systems:
Sputter Components
Pre-Treatment
Measurement & Software


Corresponding equipment

XENIA

Wafer & Glass Coating System

INLINE Systems

Modular Process Systems

Production/Internet/Live