Planar Magnetron Bodies

We offer state-of-the-art planar magnetrons for high-end technology applications. Our components are developed and manufacturred 100 percent by VON ARDENNE.

Their performance has been industry-proven in depositing blocker and absorber layers for high-end triple Low-E coatings on glass coating systems but also in PV coating systems, in roll-to-roll web coaters and coating systems for display and other special applications.

We have sold more than 350 planar magnetrons for a wide range of different applications. They are available for retrofits and as adaption for new coating lines. Furthermore, we can provide them as complete process lids with and without direct pumping.

Hot target clamping available (e.g. for ITO) process evaluations for NiCr, Cr, Ag and others.

The product family consists of three different types of magnetrons: the Standard WSM, the High-Utilization Planar Magnetron WSM-HU and the Planar XT.