INLINE Systems

Modular Process Systems

For the processing of larger substrates at a higher productivity, VON ARDENNE provides several inline coating systems. We have delivered and installed such inline systems both in vertical and horizontal design.

 

They are used for medium-scale production and for layer optimization by customers running our larger coating equipment, as the resulting process parameters can be easily transferred.

概要

用途: architectural glazing, automotive, basic research, batteries, decorative coatings, displays & touch panels, fuel cells, LED lighting, mechatronics (MEMS, MOEMS), medical devices, organic LEDs, photovoltaics, precision optics, sensors

基板形状: flat/rigid, flexible, three-dimensional

基板材料: glass, steel, wafers

製膜技術: ALD, electron beam technology, hot-wire CVD (HWCVD), magnetron sputtering down, magnetron sputtering up, magnetron sputtering vertical, plasma-enhanced CVD (PECVD), thermal evaporation

機能: absorption, active OLED layer, anti-fingerprint, anti-reflection, contact, corrosion protection, decoration, diffusion barrier, heat insulation, passivation, primer, reflection, semiconductor, solar control, TCO, wave length filter

成膜層および層構造: Double Low-E, Low-E, Solar Control, Triple Low-E

対応コンポーネント & システム:
Electron Beam Components
Sputter Components
Pre-Treatment
Measurement & Software


該当装置

LOAD LOCK Systems

モジュールシステム

Fuel Cell

注目のテクノロジー

Production/Internet/Live