OPTA X

rotary disk coating system

The OPTA X is our system for the most sophisticated layer systems in precision optics, especially for optical multi-layer systems with a high number of layers. The coating is done horizontally, and different processes are available for an optimal coating: Meta Mode, CARS*, reactive and non-reactive sputtering.

A key feature of the system is the process access from the bottom and the top, which makes it possible to configure the coating direction. In addition to sputter-up and sputter-down configurations, substrates can be coated simultaneously on both sides. This can save valuable time during production. Furthermore, it offers a way to compensate for coating stress on the front and back sides and to avoid substrate deformation.

The system has five ports that can be used to integrate magnetrons and/or plasma sources. In-situ measurement technology is also available for monitoring and adjusting the coating process.

The OPTA X is equipped with a modular automatic handling system that enables a safe loading of the system with various substrates that are passed through the system in customized carriers.

Depending on the process and productivity requirements, different module types, such as magazine load locks or pre- or post-treatment chambers, can be combined.

*Fraunhofer IST

概述

应用: 半导体设备, 精密光学

基片形状: 三维, 平面/刚性

基材: 晶圆, 玻璃, 聚合物

镀膜技术: 磁控溅射(向上), 磁控溅射(向下)

功能: , 反射, 波长滤光片, 防反射


相应的设备

Production/Internet/Live